Masashi Nojima
Tokyo University of Science, Japan
Biography
Dr. Masashi Nojima, Ph.D.-engineering, now is a Junior Associate Professor of engineering, Research Institute of Science and Technology, Tokyo University of Science. He completed his doctorate in the micro-beam analysis in 2003. He has invented shave-off depth profiling by utilizing FIB micro-machining and SIMS. He applied the shave-off depth profiling for failure analysis of nano-devices: electro-chemical-migration phenomena in 2005-2008. In 2012, he has developed Ar gas cluster ion beam (GCIB) dynamic SIMS system for polymer depth profiling and imaging. From 2013, he has started to develop a new principle mass analyzer supported by JST-SENTAN program.
Abstract
Abstract : A new principle mass spectrometer using two rotating electric fields